E00600 - SEMI E6 - Guide for Semiconductor Equipment Installation Documentation Revision:SEMI E6-96 - Superseded It is defined in a

It is defined in a general way so that it can be applied to different domains

SEMI E113-1101 (first published)

SEMI E30-1103E (editorial revision)

for a mass flow controller [MFC])

Test methods for the optical properties of 3D luminance

E00600 - SEMI E6 - Guide for Semiconductor Equipment Installation Documentation Revision:SEMI E6-96 - Superseded It is defined in aNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 Within the semiconductor industry, the diversity and complexity of equipment creates difficult challenges for facilities design and equipment installation. This Guide should benefit equipment suppliers and