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1 Purpose
many items are not now commonly specified
the apparatus required is less complex
SEMI MF110-1105 (technical revision)
Only the physical interfaces for the load port are specified
G05300 - SEMI G53 - Specification for Metal Lid/Preform Assembly StdPbc-0116 1 PurposeThis specification provides guidelines for the design and acceptance of metal lid preform assemblies. This specification may be used by suppliers at outgoing inspection and by the customers at incoming inspection. The design and acceptance criteria may be used for metal lid preform assemblies used on all types of semiconductor packages. Improper lid preform design and poorly specified lid preforms contributes to low sealing yields and unreliable
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