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This standard was technically approved by the global Liquid Chemicals Committee
It is the intent of this Document to provide general guidelines for preparation of calibration gas mixtures in compliance with ISO 6142
Hydrogen chloride is shipped as a liquefied compressed gas stored under its own vapor pressure
This Document covers requirements for sulfur hexafluoride used in the semiconductor industry
• the purity of the gases used for mixture preparation
C08000 - SEMI C80 - Guide for Tetrakis(Dimethylamino) Silane (TDMAS) StdDcs-Withdrawn This standard was technically approvedThe purpose of this Document is to provide a guide for tetrakis(dimethylamino) silane (TDMAS) for which a need has been identified. The scope of this Document covers high purity TDMAS which is used in the semiconductor industry for the deposition of silicon oxide and silicon nitride based layers by atomic layer deposition. Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemical
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