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notably for trace impurities
12-86 (technical revision)
a mixed sample is used for analysis
–工廠委員會之技術認可，同時也是日本平面顯示器工廠自動化委員會的直接責任。目前之版本是在2004年11月24日，由日本區標準委員會所認可。最初可在2005年1月的網址www
この仕様は，高圧ガスシリンダに充填された窒素に適用される。パイプライン・ガスには適用されない。
C00349 - SEMI C3.49 - Standard for Bulk Nitrogen (N2), 99.99999% Quality StdTpc-FPD Substrates notably for trace impuritiesThis Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in March 2003; originally published in 1994. NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59. Nitrogen is an odorless, tasteless, diatomic gas comprising approximately 78% of the earths atmosphere; colorless liquid. Noncombustible; a cryogenic gas derived from liquid air by fractional