F08400 - SEMI F84 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F84-1012 - Inactive originally published November 2013

originally published November 2013

SEMI M1-0704 (designation update)

variable items

本スタンダードは，global Physical Interfaces and Carriers Committeeで技術的に承認されている。現版は2010年4月30日，global Audits and Reviews Subcommitteeにて発行が承認された。2010年6月にwww

provision is made for an associated human readable interpretation

F08400 - SEMI F84 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F84-1012 - Inactive originally published November 2013This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2004; previously published March 2012. This Standard establishes the properties and physical dimensions of three port components for 1. 125 inch type surface mount gas