F07900 - SEMI F79 - Guide for Gas Compatibility with Silicon Used in Gas Distribution Components Revision:SEMI F79-0703 - Superseded images based on average picture

images based on average picture level (APL) of IEC 62087:2011 and IEC TR 63274:2020 are required

As a result

odorless and tasteless

and affected substrates

originally published in 1978

F07900 - SEMI F79 - Guide for Gas Compatibility with Silicon Used in Gas Distribution Components Revision:SEMI F79-0703 - Superseded images based on average pictureThe purpose of this Guide is to identify resource information on compatibility of gases in contact with silicon in the wetted path of a gas delivery system operating at typical gas distribution system conditions. The information and conclusions provided are taken from published literature. References are cited. Recommendations are made based on the cited literature, although no opinion is made as to the validity of the cited literature. The