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What you’ll learn
Provide a richer information palette to facilitate interchange of layout-related information between design and manufacturing
3 The Guide also applies to measurement systems that provide only a subset of the measurement features outlined in Table 3
在審查是否符合本基準時，應以本基準所提的所有要素作為判定依據。
The cleaning steps detailed in this Test Method are retained
E19300 - SEMI E193 - Specification for 300 mm Film Frame FOUP (FFF) StdTpc-Gas Particle Specifications What you’ll learnNOTICE: This Standard does not follow normal formatting rules; it is being published with colored text in Table 1, 10. 4. 1, 10. 4. 1. 2, 10. 4. 1. 3, and Table 2. 1 Purpose 1. 1 The purpose of this Specification is to establish basic physical dimensions for the film frame front opening unified pod (FOUP) which is intended to be used to transport and store 300 mm film frames, as specified by SEMI G74 and within integrated circuit manufacturing
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