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It expands the GEM standard requirements and capabilities in the areas of state models (TSC
SEMI F32 — Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves
and important electrical parameters such as delivered power
SEMI M54 — Guide for Semi-Insulating (SI) GaAs Material Parameters
SEMI E39 — Object Services Standard: Concept
P00100 - SEMI P1 - Specification for Hard Surface Photomask Substrates StdDcs-Inactive It expands the GEM standardNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This Document was completely rewritten in 2008. This Specification covers the general requirements of the glass substrate for hard surface photomasks. This Document covers square photomasks up to 7 inches in length.
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