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本スタンダードは，global Metrics Technical Committeeで技術的に承認されている。現版は2012年8月30日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年9月にwww
This Test Method covers a noncontacting
turbo molecular pumps
• Phosphine (PH3)
and (2) errors in resistivity determination that result from uncertainties in wafer diameter
M04100 - SEMI M41 - Specification of Silicon-on-Insulator (SOI) for Power Device/ICs StdPbc-0312 本スタンダードは，global Metrics Technical Committeeで技術的に承認されている。現版は2012年8月30日，global AuditsNOTICE: This Document was completely rewritten in 2022. This Specification covers requirements for silicon on insulator (SOI) for semiconductor power device IC manufacture. By defining inspection procedures and acceptance criteria, both users and suppliers may define product characteristics and quality requirements. This Specification provides requirements of SOI wafers, which are used for power devices ICs of specific voltage applications. The