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> 1 × 1014 atoms/cm3
orgで入手可能となり，1999年2月発行に至る。
but it is not expected to be material dependent
SEMI E43 — Guide for Measuring Static Charge on Objects and Surfaces
sampling sites and mapping
E05414 - SEMI E54.14 - Specification for Sensor/Actuator Network Communications for PROFINET StdPbc-0324 > 1 × 1014 atoms/cm3This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 19, 2008. It was available at www. semi. org in February 2009. Originally published March 2005. NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately. This specification is part of the SEMI Sensor